• DocumentCode
    3556232
  • Title

    A mutual capacitive normal-and shear-sensitive tactile sensor

  • Author

    Fan, L.S. ; White, R.M. ; Muller, R.S.

  • Author_Institution
    University of California, Berkeley, CA
  • Volume
    30
  • fYear
    1984
  • fDate
    1984
  • Firstpage
    220
  • Lastpage
    222
  • Abstract
    A new type of tactile sensor is introduced for either robotics [1] or prosthetic applications. The sensor, made by IC microfabrication techniques, detects displacement of a shielding plate which alters the mutual capacitance between two electrodes. Both normal and shear sensitivity are obtained, and a 16% change of capacitance is produced by a normal stress of 5 gw/cm2. Torque sensitivity can also be expected.
  • Keywords
    Capacitance; Capacitive sensors; Dielectric substrates; Electrodes; Magnetic sensors; Permittivity; Polymers; Sensor arrays; Stress; Tactile sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1984 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1984.190685
  • Filename
    1484456
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3556232