DocumentCode
355710
Title
Characterization of Ta2O5-MgF2 composite thin films
Author
Uk Ryu, Tae ; Jin Kim, Dong ; Hong Hahn, Sung ; Won Kim, Sok ; Jung Kim, Eui
Author_Institution
Dept. of Phys., Ulsan Univ., South Korea
Volume
1
fYear
2000
fDate
2000
Lastpage
104
Abstract
We deposited composite Ta2O5-MgF2 thin films by coevaporation, and explored their optical and mechanical properties. The refractive indices of pure Ta2O5 and MgF2 films were 1.94~2.15 and 1.38 at 550 nm wavelength, respectively. In the composite film system, the measured refractive index agreed well with the Lorentz-Lorenz formula and all films had tensile stress, in the range (0.7~3.1)×109 dyne/cm2, depending upon the film composition. The film stress did not vary linearly with the film composition
Keywords
composite materials; electron beam deposition; internal stresses; magnesium compounds; optical films; refractive index; tantalum compounds; vacuum deposited coatings; 550 nm; Lorentz-Lorenz formula; MgF2; Ta2O5; Ta2O5-MgF2; coevaporation; composite thin films; film composition dependence; mechanical properties; optical properties; refractive indices; tensile stress; Composite materials; Optical films; Optical filters; Optical materials; Optical refraction; Optical sensors; Optical variables control; Refractive index; Tensile stress; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
Conference_Location
Ulsan
Print_ISBN
0-7803-6486-4
Type
conf
DOI
10.1109/KORUS.2000.865930
Filename
865930
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