• DocumentCode
    3557131
  • Title

    Session 26 Device technology — Dielectrics and shallow junctions

  • Author

    Saks, N. ; Mochizuki, Takashi

  • Author_Institution
    Naval Research Laboratory
  • fYear
    1987
  • fDate
    6-9 Dec. 1987
  • Firstpage
    565
  • Lastpage
    565
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1987 International
  • Conference_Location
    Washington, DC, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1987.191488
  • Filename
    1487446
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3557131