Title :
Session 32 Device technology — Isolation & lithography
Author :
Sinha, Aloka ; Akasaka, Y.
Author_Institution :
SEMATECH/AT&T
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1987 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1987.191534
