DocumentCode
3557549
Title
A simple, high performance piezoresistive accelerometer
Author
Suminto, J.T.
Author_Institution
Allied Signal Aerosp. Co., Sunnyvale, CA, USA
fYear
1991
fDate
24-27 June 1991
Firstpage
104
Lastpage
107
Abstract
The author describes the structure, manufacture, and performance of a 1000 g full-scale piezoresistive accelerometer. This accelerometer has a very high resonant frequency, nominally 65 kHz, and is designed to have a sensitivity of 0.2 mV/g. The design is executed in (110) silicon. The piezoresistors and inertial system are formed in one etching step. The piezoresistors are suspended between the inertial mass and support rim, and are very small in volume, 7.8*10/sup -10/ cm/sup 3/, thus needing very small strain energy.<>
Keywords
accelerometers; elemental semiconductors; etching; piezoelectric transducers; semiconductor technology; silicon; 65 kHz; Si; etching; inertial system; manufacture; piezoresistive accelerometer; structure; Accelerometers; Electric shock; Etching; Fasteners; Piezoresistance; Piezoresistive devices; Protection; Pulp manufacturing; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.148811
Filename
148811
Link To Document