Title :
Film Composition, Substrate Temperature, and Thickness Dependence of Sm(Co, Cu)
/Ru Thin Films With Perpendicular Anisotropy
Author :
Liu, Xiaoqi ; Zhao, Haibao ; Kubota, Yukiko ; Wang, Jian-Ping
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN
Abstract :
SmCo5 thin film has been considered as one of several promising candidates for extremely high areal density recording media because of the demand of media with extremely small but thermally stable grains. In this paper, Sm(Co, Cu)5 films with perpendicular anisotropy were successfully fabricated by dc sputtering with relatively small grain size. Zero in-plane coercivity and 11 kOe out-of-plane coercivity were obtained on Ta(3 nm)/Sm-Co-Cu(10 nm)/Ru(20 nm)/Ta(4.2 nm) thin films. Effects of deposition temperature, film composition, and film thickness on the magnetic properties of SmCoCu films were investigated and reported.
Keywords :
cobalt alloys; coercive force; copper alloys; grain size; magnetic hysteresis; magnetic thin films; perpendicular magnetic anisotropy; perpendicular magnetic recording; ruthenium; samarium alloys; sputter deposition; tantalum; Sm(CoCu)5-Ru; Ta-SmCoCu-Ru-Ta; dc magnetron sputtering system; deposition temperature; glass substrate temperature; grain size; high areal density recording media; magnetic hysteresis; magnetic properties; perpendicular magnetic anisotropy; size 10 nm; size 20 nm; size 3 nm; size 4.2 nm; thin film composition; zero in-plane coercivity; Energy assisted magnetic recording; Ru underlayer; Sm(Co, Cu)$_{5}$ ; SmCo$_{5}$ ; heat assisted magnetic recording; magnetic media; perpendicular anisotropy;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2008.2001611