Title :
Dispensing well plate (DWP): a highly integrated nanoliter dispensing system
Author :
Koltay, P. ; Bohl, B. ; Taoufik, S. ; Steger, R. ; Messner, S. ; Sandmaier, H. ; Zengerle, R.
Author_Institution :
Freiburg Univ., Germany
Abstract :
This paper reports on the analysis of the Dispensing Well Plate (DWP) micro dispenser. The DWP device is able to deliver simultaneously hundreds to thousands of different liquids in the range of 10 to 100 nL at a very high level of system integration. The presented prototype with 96 parallel dispensing channels comprising a fixed dosage volume of 50 nL each has been manufactured using a new low cost production process based on SU-8. The dispensing dynamics of the DWP prototype is studied on basis of computational fluid dynamic (CFD) simulations and experimental data. Critical parameters for fabrication and design rules for performance optimisation are identified and quantified, such as the nozzle shape and the fluidic resistance of the capillary channel.
Keywords :
capillarity; computational fluid dynamics; elemental semiconductors; flow simulation; integrated circuit modelling; microfluidics; nozzles; prototypes; silicon; silicon compounds; CFD; Si-SiO/sub 2/; capillary channel; computational fluid dynamic simulations; design rules; dispensing well plate microdispenser; fluidic resistance; highly integrated nanoliter dispensing system; low cost production process; nozzle; parallel dispensing channels; system integration; Computational fluid dynamics; Computational modeling; Costs; Fabrication; Liquids; Manufacturing processes; Optimization; Production; Prototypes; Virtual prototyping;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215242
