Title :
Micromachined thermal conductivity sensor for the liquid phase
Author :
Kuntner, J. ; Kohl, F. ; Jakoby, B.
Author_Institution :
Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Austria
Abstract :
Due to the small thermal masses and reduced conductivities, membrane-based micromachined thermal sensors offer features superior to those provided by comparable macroscopic measurement setups. Such a device is applied to determine the thermal transport properties of various liquids. By sinusoidally exciting a heater, that is placed on a membrane, and recording the resulting temperature at a specified distance, both the thermal conductivity and the diffusivity of the liquid can be determined by means of amplitude and phase measurements.
Keywords :
liquids; membranes; micromachining; microsensors; temperature sensors; thermal conductivity; thermal conductivity measurement; thermal diffusivity; amplitude measurements; liquid phase; membrane-based micromachined thermal sensors; micromachined thermal conductivity sensor; phase measurements; reduced thermal conductivity; sinusoidal excitation; thermal diffusivity; thermal mass; thermal transport properties; Amorphous materials; Biomembranes; Germanium; Liquids; Sensor systems; Silicon; Temperature sensors; Thermal conductivity; Thermal sensors; Thermistors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496481