DocumentCode
3565129
Title
An ultra-sensitive resistive pressure sensor based on the V-shaped foam-like structure of laser-scribed graphene
Author
He Tian ; Yi Shu ; Xue-Feng Wang ; Ali Mohammad, Mohammad ; Cheng Li ; Yi Yang ; Tian-Ling Ren
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2014
Abstract
We demonstrate a flexible, ultra-sensitive resistive pressure sensor based on the foam-like structure of laser-scribed graphene (LSG). Benefitting from the unique microstructure of the LSG, the sensitivity of the pressure sensor is as high as 0.96 kPa-1 in the low pressure range (0~50 kPa), which is the highest among all reported graphene-based pressure sensors. Moreover, the sensitivity in the high pressure range (50~113 kPa) is 0.005 kPa-1. The response of the pressure sensor is highly stable up to 100 cycles with excellent performance. Our pressure sensor can meet the needs of specific applications, for example, high sensitivity for low-pressure applications and low sensitivity for high deformation applications. Moreover, the laser-scribing technology could enable large-scale production of the LSG pressure sensor with low cost in ~20 minutes. Our work indicates that laser scribed flexible graphene pressure sensors could be widely used for artificial electronic skin (e-skin), medical-sensing, bio-sensing and many other areas.
Keywords
graphene; laser materials processing; microsensors; pressure sensors; V-shaped foam like structure; laser scribed graphene; ultrasensitive resistive pressure sensor; unique microstructure; DVD; Fabrication; Films; Graphene; Lasers; Sensitivity; Sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2014 IEEE International
Type
conf
DOI
10.1109/IEDM.2014.7047055
Filename
7047055
Link To Document