Nanosystems monolithically integrated with CMOS: emerging applications and technologies

This paper reviews the last major realizations in the field of monolithic integration of NEMS with CMOS. This integration scheme not only drastically improves the efficiency of the electrical detection of the NEMS motion. Our analysis is that it also represents a compulsory milestone to practically implement breakthrough applications of NEMS, such as mass spectrometry, that require large capture cross section (VLSI-arrayed NEMS) and individual addressing (co-integration of NEMS arrays with CMOS for closed-loop operation).