Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling

Author

Campanella, Humberto ; Nan Wang ; Narducci, Margarita ; Soon, Jeffrey Bo Woon ; Chong Pei Ho ; Chengkuo Lee ; Gu, Alex

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2014

Abstract

We report a radio frequency micro electromechanical system (RFMEMS) device integrated with phononic crystals (PnC) that provide a Lamb-wave resonator with frequency-selective heat management, power handling capability, and more efficient electromechanical coupling at ultra high frequency (UHF) and low microwave bands. The integrated device is fabricated in a silicon-on-insulator (SOI) aluminum nitride (AlN) platform and boosts thermal performance by 40%, power handling by 3 dB, and coupling coefficient by three times. Design approach is scalable to higher frequencies.

Keywords

UHF resonators; aluminium compounds; elemental semiconductors; frequency selective surfaces; micromechanical devices; microwave resonators; photonic crystals; silicon-on-insulator; surface acoustic waves; AlN; Lamb-wave resonator; RF-MEMS resonators; SOI; Si; UHF bands; electromechanical coupling; frequency-selective heat management; microwave bands; phononic crystals; power handling; radio frequency micro electromechanical system device; silicon-on-insulator; ultra high frequency bands; Acoustic waves; Arrays; III-V semiconductor materials; Micromechanical devices; Optical resonators; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2014 IEEE International

Type

conf

DOI

10.1109/IEDM.2014.7047102

Filename

7047102