Title :
Electrical characterization of aluminum interdigitated electrodes for PH sensing application
Author :
Azmi, M. Safwan ; Nadzirah, Sh ; Hashim, U.
Author_Institution :
Inst. of Nano Electron. Eng., Univ. Malaysia Perlis, Kangar, Malaysia
Abstract :
The purpose of this paper is to study the electrical characteristics of aluminum interdigitated electrodes (IDE) on silicon substrate for pH sensing application. The IDEs are fabricated using standard photolithography process. It is then tested for each pH groups which are acidic, neutral and basic groups. They are then electrically characterized and their current-voltage curves are obtained.
Keywords :
aluminium; bioelectric potentials; biological techniques; biomedical electrodes; pH measurement; photolithography; silicon; Al; IDE electrical characterization; IDE fabrication; aluminum interdigitated electrode; current-voltage curves; pH sensing application; silicon substrate; standard photolithography process; Aluminum; Conferences; Electrodes; Resists; Sensors; Silicon; Standards;
Conference_Titel :
Biomedical Engineering and Sciences (IECBES), 2014 IEEE Conference on
DOI :
10.1109/IECBES.2014.7047549
