DC converter control using deadbeat control of high switching frequency for two-type operation modes

Recently, devices for manufacturing semiconductor products require plasma. Plasma is generated by two types of high frequency power, a High/Low and an ON/OFF output. A power supply, which can output the high frequency power is required to be more efficient and more compact. In order to achieve high frequency output with the High/Low pulse, the output capacitance in a power supply should be reduced. From this reduction, voltage vibration and voltage overshoot are increased. These problems can be solved by a suitable control, which keeps the output voltage stable. This paper proposes a deadbeat control which uses a reference current and replacement parameter of a load variation. The proposed method is capable of controlling output voltage without taking into account voltage vibration. The theory of the proposed method is evaluated by simulations. The availability of that is verified through experiments. The results obtained show that the proposed deadbeat control reduced the vibration range of the output voltage by half. In addition, the voltage overshoot is almost suppressed. The proposed deadbeat control realizes stable output of the ON/OFF pulse and enables high frequency output of the High/Low pulse.