Title :
On-wafer high-frequency device characterization
Author :
Koolen, M.C.A.M.
Author_Institution :
Philips Research laboratories, P.O. Box 80.000, 5600 JA Eindhoven, The Netherlands
Abstract :
As device size decreases and operation speed increases, the demands posed to the techniques for calibration and correction for high-frequency characterization of IC-components become more stringent. At the same time the importance of high-frequency characterization increases since device behavior can no longer be sufficiently well predicted using low-frequency measurements only. Small-signal high-frequency measurements then provide extra information for device characterization.
Keywords :
Calibration; Capacitance measurement; Frequency measurement; Impedance measurement; Length measurement; Loss measurement; Microwave measurements; Size measurement; Time measurement; Velocity measurement;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
