Title :
A micromachined tunable CPW resonator
Author :
Ketterl, T. ; Weller, T. ; Fries, D.
Author_Institution :
Dept. of Electr. Eng., Univ. of South Florida, FL, USA
Abstract :
This paper presents a novel tunable microwave resonator, consisting of a CPW spiral inductor with a cantilever interconnect structure. Tuning was achieved by applying a DC bias between the input and output of the resonator circuit. An observable resonance tuning between 3 and 7 GHz was accomplished by applying a bias from 0 to 40 V. Corresponding Q-factors between 17 and 20 were obtained in this tuning range.
Keywords :
Q-factor; circuit tuning; coplanar waveguide components; electrostatic actuators; inductors; micromachining; micromechanical resonators; 3 to 7 GHz; CPW spiral inductor; DC bias; Q-factors; cantilever interconnect structure; electrostatic force; micromachined tunable CPW resonator; resonance tuning; resonator circuit I/O; surface micromachining; tunable microwave resonator; Circuit optimization; Conductors; Coplanar waveguides; Inductors; Optical microscopy; Optical resonators; Spirals; Structural beams; Tunable circuits and devices; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.966903
