Title :
Improved variable EWMA controller design
Author :
Ming-Da Ma ; Jia-Yi Li ; Kai Zhang
Author_Institution :
Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China
Abstract :
The exponentially weighted moving average (EWMA) controller is a popular run-to-run (RtR) control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error (MSE) of process output at each run. The proposed method overcomes some potential problems of Tseng´s method and can be applied to general autoregressive integrated moving average (ARIMA) processes. Simulation examples are given to show the effectiveness of the proposed method.
Keywords :
autoregressive moving average processes; control system synthesis; semiconductor device manufacture; ARIMA process; MSE; RtR control scheme; autoregressive integrated moving average process; exponentially weighted moving average; mean square error minimization; optimal discount factor; run-to-run control scheme; semiconductor manufacturing; variable EWMA controller design; Control systems; Design methodology; Equations; Manufacturing; Mean square error methods; Process control; Stability analysis; EWMA; Run-to-run control; semiconductor manufacturing; variable discount factor;
Conference_Titel :
Intelligent Control and Automation (WCICA), 2014 11th World Congress on
DOI :
10.1109/WCICA.2014.7053439
