Title :
Advanced Technology Challenges for High-Performance Microprocessor Applications
Author :
Parrillo, Louis C.
Author_Institution :
Motorola, Advanced products Research And Development laboratory, Austin, Texas
Keywords :
Dielectric devices; Dielectric materials; Integrated circuit interconnections; Laboratories; Logic devices; Materials reliability; Microprocessors; Production; Research and development; Ultra large scale integration;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
