Title :
Design and test of resonators using PiezoMUMPS technology
Author :
Pons-Nin, Joan ; Gorreta, Sergi ; Dominguez, Manuel ; Blokhina, Elena ; O´Connell, Diarmuid ; Feely, Orla
Author_Institution :
Electron. Eng. Dept., Tech. Univ. of Catalonia, Barcelona, Spain
Abstract :
This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
Keywords :
MUMPS; crystal resonators; micromechanical devices; oscillators; vibrations; PDO; PiezoMUMPS process; PiezoMUMPS technology; mechanical vibration modes; piezoelectric MEMS; pulsed digital oscillators; resonators; Finite element analysis; Micromechanical devices; Oscillators; Piezoelectric devices; Publishing; Resonant frequency; Vibrations; MEMS resonators; Piezo-MEMS; mechanical modes;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056666
