Title :
A comparative study of reduced-order modeling techniques for nonlinear MEMS beams
Author :
Juillard, Jerome
Author_Institution :
E3S, SUPELEC, Gif-sur-Yvette, France
Abstract :
This paper is dedicated to the comparison of three techniques of reduced-order modeling (ROM) that may be applied to MEMS beams subject to nonlinear damping and restoring forces. These methods are compared in terms of simplicity and accuracy, in the static, transient and steady-state regimes. It is shown that one of the most popular ROM methods may lead to dramatically wrong results in the case of single-mode decomposition.
Keywords :
damping; micromechanical devices; reduced order systems; ROM method; microelectromechanical system; nonlinear MEMS beam; nonlinear damping; reduced-order modeling technique; restoring force; single-mode decomposition; static regimes; steady-state regime; transient regime; Damping; Frequency response; Mathematical model; Micromechanical devices; Polynomials; Steady-state; Transient analysis; Reduced-order modeling; electrostatic nonlinearity;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056674
