Optical properties characterization of silicon micro/nanostructures: Towards a predictive reflectance simulation model based on surface topography

In the present paper, the reduced spectral reflectance properties of silicon micro/nanostructures are studied. In the aim of implementing a predictive reflectance simulation model based on surface topography, an alternative design method of an equivalent unit cell is proposed, where the dimensions and shape are determined based on statistical parameters of the sample topography. A good concordance is reported when comparing reflectance simulations of the equivalent unit cell structure with measurements on Black Silicon (BSi) samples performed with an integrating sphere.