• DocumentCode
    3575485
  • Title

    Millimeterwave micro-coax development using simplified 3D fabrication process

  • Author

    Vahabisani, Nahid ; Daneshmand, Mojgan

  • Author_Institution
    ECE Dept., Univ. of Alberta, Edmonton, AB, Canada
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper presents the development of 3D millimeter-wave half-coax devices through a simplified 3 mask layer monolithic wafer-level micro-fabrication process. As the result of this fabrication technology, a whole variety of on-wafer RF MEMS devices including 2D and 3D structures can be fabricated and integrated on a single die.
  • Keywords
    microfabrication; micromechanical devices; millimetre wave devices; 2D structures; 3D millimeter-wave half-coax devices; 3D structures; millimeter wave micro-coax development; monolithic wafer-level micro-fabrication; on-wafer RF MEMS devices; Conductors; Coplanar waveguides; Fabrication; Metals; Micromechanical devices; Millimeter wave technology; Three-dimensional displays; Half-coax; millimeter-wave; monolithic; wafer-level;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Millimeter-Wave and Terahertz Technologies (MMWATT), 2014 Third Conference on
  • Print_ISBN
    978-1-4799-6590-8
  • Type

    conf

  • DOI
    10.1109/MMWaTT.2014.7057193
  • Filename
    7057193
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3575485