• DocumentCode
    3575588
  • Title

    Near field microwave microscopy for nanoscale characterization, imaging and patterning of graphene

  • Author

    Monti, Tamara ; Di Donato, Andrea ; Mencarelli, Davide ; Venanzoni, Giuseppe ; Morini, Antonio ; Farina, Marco ; Vlassiouk, Ivan V. ; Tselev, Alexander

  • Author_Institution
    Dipt. di Ing. dell´Inf. (DII), Univ. Politec. delle Marche, Ancona, Italy
  • fYear
    2014
  • Firstpage
    32
  • Lastpage
    38
  • Abstract
    This paper reports images of reproducible nanopatterns on hexagonal graphene flakes, produced by modulating the input power of a Near-Field Scanning Microwave Microscope, used at the same time for the characterization of the samples. We have studied the impact of different time exposures to the microwave field, and of different power levels. A possible explanation of the patterning mechanism is given by the heating-induced oxidation of the exposed graphene flakes. In order to confirm this assumption, we have developed a simplified model for the analysis of the heat distribution, and for the estimation of the temperature under the microscope probe. This effect could be the basis for an alternative nanolithographic technique.
  • Keywords
    graphene; microwave measurement; nanopatterning; oxidation; scanning probe microscopy; C; exposed graphene flakes; heat distribution; heating-induced oxidation; imaging; microscope probe; microwave field; nanoscale characterization; near field microwave microscopy; patterning; power levels; time exposures; Copper; Electromagnetic heating; Graphene; Lithography; Microscopy; Microwave imaging; Microwave theory and techniques; Graphene; Nanolithography; Nanopatterning; Scanning Probe Microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2014.7057298
  • Filename
    7057298