DocumentCode
3575588
Title
Near field microwave microscopy for nanoscale characterization, imaging and patterning of graphene
Author
Monti, Tamara ; Di Donato, Andrea ; Mencarelli, Davide ; Venanzoni, Giuseppe ; Morini, Antonio ; Farina, Marco ; Vlassiouk, Ivan V. ; Tselev, Alexander
Author_Institution
Dipt. di Ing. dell´Inf. (DII), Univ. Politec. delle Marche, Ancona, Italy
fYear
2014
Firstpage
32
Lastpage
38
Abstract
This paper reports images of reproducible nanopatterns on hexagonal graphene flakes, produced by modulating the input power of a Near-Field Scanning Microwave Microscope, used at the same time for the characterization of the samples. We have studied the impact of different time exposures to the microwave field, and of different power levels. A possible explanation of the patterning mechanism is given by the heating-induced oxidation of the exposed graphene flakes. In order to confirm this assumption, we have developed a simplified model for the analysis of the heat distribution, and for the estimation of the temperature under the microscope probe. This effect could be the basis for an alternative nanolithographic technique.
Keywords
graphene; microwave measurement; nanopatterning; oxidation; scanning probe microscopy; C; exposed graphene flakes; heat distribution; heating-induced oxidation; imaging; microscope probe; microwave field; nanoscale characterization; near field microwave microscopy; patterning; power levels; time exposures; Copper; Electromagnetic heating; Graphene; Lithography; Microscopy; Microwave imaging; Microwave theory and techniques; Graphene; Nanolithography; Nanopatterning; Scanning Probe Microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
Type
conf
DOI
10.1109/3M-NANO.2014.7057298
Filename
7057298
Link To Document