DocumentCode
3575598
Title
A novel simple 3D SU8 prism-SOI waveguide interface for light coupling improvement
Author
Minh-Hang Nguyen ; Tuan-Hung Nguyen ; Hai-Binh Nguyen ; Fan-Gang Tseng ; Jain-Ren Lai ; Ming-Chang Lee ; Kai-Ning Ku
Author_Institution
Center for Microelectron. & Inf. Technol., Nat. Center for Technol. Progress, Hanoi, Vietnam
fYear
2014
Firstpage
193
Lastpage
196
Abstract
This paper presents optimized structural interface between 3D SU8 prism and SOI waveguide for reduced coupling loss at the interface, hence increasing light transmission efficiency over the system. The coupling loss reduced to 10 % at each optimized interface thanks to SU8 overlap on tip of SOI waveguide and partly etched BOX under the interface. With large tolerance up to 5 μm, the interface can be easily fabricated.
Keywords
integrated optics; optical couplers; optical fabrication; optical losses; optical prisms; optical waveguides; silicon-on-insulator; Si; light coupling improvement; light transmission efficiency; optimized structural interface; partly etched BOX; reduced coupling loss; simple 3D SU8 prism-SOI waveguide interface; Couplings; Monitoring; Optical fibers; Propagation losses; Silicon; Three-dimensional displays; SOI waveguide; SU8 prism; coupling; interface; transmission;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
Type
conf
DOI
10.1109/3M-NANO.2014.7057306
Filename
7057306
Link To Document