Fast predicting statistical subsurface damage parameters of the K9 sample

Based on the subsurface damage model and the material removal rate of K9 glass in HF acid solution, a fast method was proposed to calculate a set of parameters to characterize the subsurface damage of a polished sample. When micro cracks of the etched sample´s subsurface can be clearly observed, by using image processing, lengths, widths, angles, densities of the micro cracks can be calculated and depths of the micro cracks may be predicted by the load-crack model. The set of the parameters, including length, depth, angle, density, and other parameters, can be considered as a complete description about subsurface damage of the sample.