Title :
Practical system for nanomanipulation
Author :
Koledov, V. ; Shavrov, V. ; Petrenko, S. ; von Gratowski, S. ; Irzhak, A. ; Shelyakov, A.
Author_Institution :
Kotelnikov Inst. of Radioeng. & Electron., Moscow, Russia
Abstract :
the paper reported about new practical system for 3D three dimensional (3D) nano-manipulation. The system consists of advanced high precision nano-manipulators based on piezoelectric resonance motors and end-effectors. The end-effector is the bimetallic composite nanotweezers based on Ti2NiCu alloy with shape memory effect. This nano-tweezer is easy in use micron-size nano-tool controlled by semiconductor laser radiation or electric current in vacuum chamber or other (i.e. liquid) environment in different types of microscopes. The new system for the first time gives the real possibility for 3D high accurate, cheap and easy in use, controllable, reproducible, quick manipulation and fabrication of large-scale nanostructures. The system can manipulate real nano-objects, such as nanotubes, bio-nanoparticles etc. The motion range - 15 mm, minimal step - 0, 4-10 nm, thermal drift <;5 nm/h at 20°C; speed of linear motion: 20 nm/s - 20 mm/s, nano-tweezers dimensions: 20*2.3*1.6 μm3, the size of the objects to be manipulated: 30 - 1000 nm.
Keywords :
end effectors; nanotechnology; nickel alloys; piezoelectric motors; shape memory effects; titanium alloys; 3D nanomanipulation; Ti2NiCu; Ti2NiCu alloy; bimetallic composite nanotweezer; electric current; end-effector; high precision nanomanipulator; large-scale nanostructure; micronsize nanotool; piezoelectric resonance motor; semiconductor laser radiation; shape memory effect; vacuum chamber; Materials; Metals; Nanoscale devices; Scanning electron microscopy; Shape; Three-dimensional displays; 3D nano-manipulation system; microactuator; nano-tweezers; piezomotor; shape memory effect;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
DOI :
10.1109/3M-NANO.2014.7057347