Title :
Nanobubbles in ion-implanted solids
Author_Institution :
Sch. of Comput. & Eng., Univ. of Huddersfield, Huddersfield, UK
Abstract :
A brief review is presented of current understanding of inert gas nanobubbles in solids in order to permit parallels and contrasts to be made with the recent topic of nanobubbles at solid/liquid interfaces. In particular, the concept of equilibrium and overpresssurized bubbles is discussed and some results are presented on the experimental determination of pressure in nanobubbles. Finally, examples are presented of different bubble morphologies including platelets and bubble superlattices.
Keywords :
bubbles; inert gases; ion implantation; nanostructured materials; pressure; superlattices; bubble morphologies; bubble superlattices; equilibrium; inert gas nanobubbles; ion-implanted solids; overpresssurized bubbles; platelets; semiconductor industry; solid-liquid interfaces; Helium; Niobium; Silicon; Solids; Nanobubbles; inert gases; ion-implantation; solids;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
DOI :
10.1109/3M-NANO.2014.7057355
