Title :
A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode
Author :
Chunhua He ; Qinwen Huang ; Yunfei En ; Qiancheng Zhao ; Zhenchuan Yang ; Guizhen Yan
Author_Institution :
No. 5 Electron. Res. Inst., Sci. & Technol. of Reliability Phys. & Applic. of Electron. Component Lab., Minist. of Ind. & Inf. Technol., Guangzhou, China
Abstract :
This paper presents a novel optimization design method for the closed loop control of the sense mode of a MEMS gyroscope, which aims at improving the performances and reliability of the control system.
Keywords :
closed loop systems; gyroscopes; micromechanical devices; optimisation; reliability; MEMS gyroscope; closed loop control; control system reliability; optimization design; sense mode; Estimation; Fabrication; Gyroscopes; Micromechanical devices; Optimization; Reliability engineering; MEMS gyroscope; fuzzy logic; optimization design; reliability;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2014 IEEE International Conference on
DOI :
10.1109/EDSSC.2014.7061183
