Design of Flexible Hinge of Micro-vibration Platform Based on Three-Translational Parallel Mechanism

In order to realize vibrations from one dimension to three dimension, three-translational parallel mechanism was used as the main mechanism of the micro-vibration platform, flexible hinge was used as the kinematic pair, thus the small and equivalent movement could be achieved through the elastic deformation of the material, and the error of the connection could be minimized. By analyzing the relationship between structural size and hinge performance together with the influence effect of designed parameters to angle stiffness, material and geometric dimension were chosen reasonably, finally correctness of the choice of the flexible hinge was verified through theoretical calculations and finite element analysis.