Design and analysis of a decoupled XY micro compliant parallel manipulator

In this paper, a new compliant parallel mechanism driven by piezoelectric actuators is designed, which is a modified structure from our previous designed stage. In order to compensate the limited stroke of PZT, the secondary amplification mechanism was adopted in this design, and also the matrix method is utilized to calculate its stiffness and compliance for this compliant mechanism. In practical application, the accuracy of mechanism is an essential index that we wish to achieve, meanwhile the parasitic motion analysis, dynamic and static analysis are also presented in this paper. The method is validated by finite element analysis to demonstrate its effectiveness.