• DocumentCode
    3593231
  • Title

    Novel technique for UV-writing of low-loss and high-temperature stable channel waveguides

  • Author

    Bazylenko, M. ; Aslund, M. ; Vandenberg, B.

  • Author_Institution
    Opt. Fibre Technol. Centre, Sydney Univ., NSW, Australia
  • Volume
    4
  • fYear
    1999
  • Firstpage
    93
  • Abstract
    Low-loss channel waveguides, stable at over 500/spl deg/C, have been UV written by masking the channel area and exploiting the large negative refractive index changes in germanosilica layers deposited by hollow cathode PECVD.
  • Keywords
    optical fabrication; optical losses; optical planar waveguides; plasma CVD; refractive index; thermal stability; 500 C; UV written; UV-writing; channel area; germanosilica layers; hollow cathode PECVD deposition; large negative refractive index; low-loss channel waveguides; low-loss high-temperature stable channel waveguides; stable; Annealing; Australia; Circuits; Glass; Planar waveguides; Plasma temperature; Refractive index; Silicon compounds; Waveguide transitions; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference, 1999, and the International Conference on Integrated Optics and Optical Fiber Communication. OFC/IOOC '99. Technical Digest
  • Print_ISBN
    1-55752-582-X
  • Type

    conf

  • DOI
    10.1109/OFC.1999.766005
  • Filename
    766005
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3593231