• DocumentCode
    3594549
  • Title

    Adaptive optics for direct writing in three-dimensional nano-fabrication

  • Author

    Jesacher, Alexander ; Simmonds, Richard ; Wilson, Tony ; Booth, Martin J.

  • Author_Institution
    Dept. of Eng. Sci., Univ. of Oxford, Oxford, UK
  • fYear
    2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates.
  • Keywords
    Adaptive optics; Optical device fabrication; Optical distortion; Optical pulses; Optical refraction; Optical sensors; Optical variables control; Plasma measurements; Waveguide lasers; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5499972
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3594549