Title :
Investigation of the LIGA process to fabricate microchannel plates
Author :
Liu, Robin H. ; Vasile, Michael J. ; Goettert, Jost ; Beebe, David J.
Author_Institution :
Illinois Univ., Urbana, IL, USA
Abstract :
This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 μm in height with planarized surfaces. A novel application of spin-on glass is developed to obtain glass structures in Ni molds. A reverse electroplating is used to remove the Ni mold and release the glass structures with height of more than 100 μm
Keywords :
X-ray lithography; electroforming; electron multipliers; electroplating; microchannel plates; sol-gel processing; 100 to 150 micron; LIGA process; Ni; area vacuum-electron multiplier; aspect ratios; microchannel geometries; microchannel plates; planarized surfaces; reverse electroplating; spin-on glass; synchrotron radiation lithography; Dry etching; Electrons; Geometry; Glass; Microchannel; Nickel; Night vision; Space technology; X-ray detection; X-ray detectors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613734
