Title :
Magnetic Properties and Magnetization Dynamics of Magnetic Tunnel Junction Bottom Electrode With Different Buffer Layers
Author :
Banasik, Monika ; Wrona, Jerzy ; Kanak, Jaroslaw ; Zietek, Slawomir ; Skowronski, Witold ; Zywczak, Antoni ; Czapkiewicz, Maciej ; Stobiecki, Tomasz
Author_Institution :
Dept. of Electron., AGH Univ. of Sci. & Technol., Krakow, Poland
Abstract :
We present the research on magnetic tunnel junction bottom electrodes CoFeB prepared on different buffer layers: 5Ta/30CuN/5Ta, 5Ta/15CuN/3Ta/15CuN/5Ta, 5Ta/10CuN/5Ta, 5Ta, 10Ta, and 5Ta/10Ru/5Ta (all thicknesses in nanometers). The buffer crystallographic microstructures were characterized with X-ray diffraction measurements while the roughness was investigated with atomic force microscopy measurements. We show the influence of crystallographic texture and surface roughness on the coercivity and anisotropy fields. Ferromagnetic resonance measurements were performed with a scalar network analyzer to determine the spin-wave dispersion relation of the precession frequency and the damping parameter. The results were confirmed with pulse inductive microwave magnetometry measurements.
Keywords :
X-ray diffraction; atomic force microscopy; buffer layers; cobalt compounds; coercive force; copper compounds; crystal microstructure; dispersion relations; ferromagnetic resonance; iron compounds; magnetic tunnelling; magnetometry; ruthenium; spin waves; surface roughness; surface texture; tantalum; CoFeB; CoFeB-Ta; CoFeB-Ta-CuN-Ta; CoFeB-Ta-CuN-Ta-CuN-Ta; CoFeB-Ta-Ru-Ta; X-ray diffraction; anisotropy fields; atomic force microscopy; buffer crystallographic microstructures; buffer layers; coercivity; crystallographic texture; damping parameter; ferromagnetic resonance measurements; magnetic tunnel junction bottom electrode; magnetization dynamics; precession frequency; pulse inductive microwave magnetometry measurements; scalar network analysis; spin-wave dispersion relation; surface roughness; Anisotropic magnetoresistance; Damping; Magnetic hysteresis; Magnetic resonance; Magnetic tunneling; Perpendicular magnetic anisotropy; Buffer layers; buffer layers; ferromagnetic resonance; ferromagnetic resonance (FMR); magnetic tunnel junction; magnetic tunnel junction (MTJ); magnetization dynamics;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2015.2440561
