Title :
Systematic Investigation of the Influence of Preparation Process and Target Composition on Structure and Magnetic Properties of Nd–Fe–B Thin Films
Author :
Hao Su ; Yan-Feng Su ; Yue Tian ; Juan Du ; Wei-Xing Xia ; A-Ru Yan ; Liu, J. Ping ; Jian Zhang
Author_Institution :
Key Lab. of Magn. Mater. & Devices, Ningbo Inst. of Mater. Technol. & Eng., Ningbo, China
Abstract :
Anisotropic Nd-Fe-B films with high performance have been prepared by dc magnetron sputtering on heated Si(100) substrates. The influences of sputtering power, target composition, deposition temperature, and annealing condition on the magnetic properties of Nd-Fe-B films were investigated systematically. The X-ray diffraction patterns showed that the Nd-Fe-B grains are aligned with their c-axes pointing normal to the film plane. It was found that the magnetic properties are sensitive to the target composition, deposition temperature, and sputtering power. The maximum energy product achieved (378 kJ/m3) is comparable with that of high-quality Nd-Fe-B sintered magnets.
Keywords :
X-ray diffraction; annealing; boron alloys; iron alloys; magnetic thin films; neodymium alloys; sputter deposition; NdFeB; Si; X-ray diffraction pattern; anisotropic thin films; dc magnetron sputtering; heated Si(100) substrates; magnetic properties; sintered magnets; sputtering power; structural properties; Annealing; Coercive force; Films; Magnetic hysteresis; Magnetic properties; Remanence; Sputtering; Magnetic property; Nd-Fe-B thin film; Nd???Fe???B thin film; Permanent magnetic material; Target composition; permanent magnetic material; target composition;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2015.2443015
