In-Plane and Out-of-Plane MEMS Gyroscopes Based on Piezoresistive NEMS Detection

This paper presents a new design and a complete characterization of amplitude-modulation gyroscopes based on piezoresistive nanogauges. The working principle and optimization criteria of in-plane and out-of-plane devices relying on double frame decoupling and levered sense mode are discussed in light of sensitivity and resolution theoretical predictions. The architecture of driving and sensing electronics is also presented. The reduced thermo-mechanical damping with output signal leads to white noise performance in the mdps/√Hz respect to capacitive configurations, and the inherently high range within an area smaller than 0.35 mm2, at pressures in the millibar range. Sub-5-ppm linearity errors within 1000 dps are also demonstrated.