• DocumentCode
    3604123
  • Title

    Direct Fabrication of Microlens Arrays on PMMA With Laser-Induced Structural Modification

  • Author

    Yan Ou ; Qing Yang ; Feng Chen ; Zefang Deng ; Guangqing Du ; Jiuhong Wang ; Hao Bian ; Jiale Yong ; Xun Hou

  • Author_Institution
    State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
  • Volume
    27
  • Issue
    21
  • fYear
    2015
  • Firstpage
    2253
  • Lastpage
    2256
  • Abstract
    Reported here is the direct fabrication of the convex microlens arrays on poymethylmethacrylate using laser-induced structural modification. Based on single femtosecond pulse in situ modification, sixty thousand convex microlenses, whose diameters was <;12 μm, could be fabricated per minute, exhibiting much higher efficiency than conventional laser direct writing technique. The formation mechanism was mainly attributed to photodecomposition, which would result in the scission of polymer chains. The shape of microlenses could be tuned by the laser power. In addition, the good optical performance of the microlens was revealed by its ability of high resolution imaging. This technique may open up a new way of preparing low-cost and large-area convex structure which is widely used in many advanced microdevices, such as lab-on-chips and biomimetic compound eyes.
  • Keywords
    high-speed optical techniques; laser materials processing; microfabrication; microlenses; optical arrays; optical fabrication; optical polymers; PMMA; convex microlens array direct fabrication; high resolution imaging; laser power; laser-induced structural modification; optical performance; photodecomposition; polymer chain scission; poymethylmethacrylate; single femtosecond pulse in situ modification; Fabrication; Imaging; Lenses; Microoptics; Optimized production technology; Plastics; Surface morphology; Convex microlens arrays; convex microlens arrays; femtosecond laser; single pulse structural modification;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2015.2459045
  • Filename
    7174471