DocumentCode
3608029
Title
Erratum to “Temperature Dependence of the Elastic Constants of Doped Silicon” [Jun 15 730-741]
Author
Ng, Eldwin J. ; Hong, Vu A. ; Yang, Yushi ; Ahn, Chae Hyuck ; Everhart, Camille L. M. ; Kenny, Thomas W.
Author_Institution
Department of Mechanical Engineering, Stanford University, Stanford, CA, USA
Volume
24
Issue
6
fYear
2015
Firstpage
2178
Lastpage
2178
Abstract
There is an error in one set of values listed in Table III, page 735. The cell in the 4th row from the bottom (Ring <110>) and rightmost column (P6.6) should read “-3.05 / -58.10 / 19.46”, not “-58.10 / -30.99 / 19.46”.
Keywords
Doping; Elasticity; Elemental semiconductors; Finite element analysis; Silicon; Temperature dependence;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2015.2483373
Filename
7295543
Link To Document