Microbridges simulation for piezoresistive gas sensors detection

A microbridges software simulation has been made using "CoventorWare 2001.3", from Coventor Inc. Within this program, we used the piezoresistive module. The microbridges are made of silicon, and the piezoresistive part is the device itself. The resonant microbridges change their resistance when the gas-sensitive layer adsorbs gas molecules from the environment. The simulations have been made for three different dimensional cases of the bridges length, in order to determine the most sensitive design model. The results have shown a good electrical current shift, of up to 20% for 22 mA up to 38 mA currents.