DocumentCode
3614722
Title
Laser technology in the formation of AuPt and AuPtTi contacts
Author
P. Machac;V. Myslik;V. Perina;J. Zlamal
Author_Institution
Institute of Chemical Technology
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
198
Lastpage
201
Keywords
"Metallization","Annealing","Contact resistance","Gold","Ohmic contacts","Laser beams","Gallium arsenide","Schottky barriers","Power lasers","Electrical resistance measurement"
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242755
Filename
1242755
Link To Document