• DocumentCode
    3614723
  • Title

    The influence of glow-discharge cleaning of Ge/Pd-GaAs on the specific contact resistivity

  • Author

    J. Zlamal;V. Myslik;P. Machac

  • Author_Institution
    Institute of Chemical Technology in Prague
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    202
  • Lastpage
    205
  • Keywords
    "Cleaning","Conductivity","Substrates","Electrodes","Ohmic contacts","Sputter etching","Gallium arsenide","Partial discharges","Wet etching","Dry etching"
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
  • Print_ISBN
    0-7803-7418-5
  • Type

    conf

  • DOI
    10.1109/SIM.2002.1242756
  • Filename
    1242756
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3614723