A Novel Absolute Magnetic Rotary Sensor

To measure the angular position of motors, robot joints, etc., an absolute magnetic rotary position sensor is developed, which possesses small-size, light, robust, and easy-to-integrate properties. The sensor consists of two inductors, i.e., a code disc and a signal processing part. Both of the two inductors are embedded with a big planar spiral copper coil and four smaller copper coils by employing microelectromechanical system (MEMS) technology, and there are two circles of regular copper sheets listing on the surface of the code disc. In addition, mathematical analyses of the inductor structure as well as the relationships of position and dimension among the coils and the copper sheet are addressed. Finite-element simulation results demonstrate that one group of the optimal sine and cosine signals can be generated by each inductor. Then, the absolute position measurement method is validated by a mathematical method. Finally, experiments are performed on the high-speed and the low-speed testing platforms to assess effectiveness and accuracy of the sensor.