Title :
Polymer thin film refractive index determination
Author :
V. Damian;P.C. Logofatu;D. Apostol;F. Garoi;I. Iordache;A. Timcu;O. Ligor;R. Muller
Author_Institution :
Lasers Dept., Nat. Inst. of Laser Plasma & Radiat. Phys., Bucharest, Romania
fDate :
6/26/1905 12:00:00 AM
Abstract :
This work presents two methods to evaluate the refractive index of a SU8 polymer thin film, used as an optical waveguide for an interferometric integrated sensor. We used Abbe´s method and the fitting method, by fitting theoretical curves to the experimental curves. We also compared the results given by the two methods.
Keywords :
"Polymer films","Refractive index","Optical interferometry","Optical sensors","Optical waveguides","Curve fitting","Integrated optics","Optical films","Optical polymers","Optical refraction"
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1403042
