3619452

A Consistent Parameter Extraction Method for Deep Submicron MOSFETs

P. Klein

Siemens AG, Germany

1997

6/19/1905 12:00:00 AM

664

667

"Parameter extraction","MOSFETs","Capacitance","Voltage","Length measurement","Electrical resistance measurement","Capacitance-voltage characteristics","Immune system","Implants","Circuits"

ieee

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

2-86332-221-4

conf

10.1109/ESSDERC.1997.194516

1503446