DocumentCode :
3619507
Title :
A New Method and Test Structure for Determination of Interconnect Parasitic Parameters
Author :
C.-J. Chao;S.-C. Wong;M.-J. Chen;B.-K. Liew
Author_Institution :
National Chiao-Tung University, Hsinchu, Taiwan
fYear :
1998
fDate :
6/20/1905 12:00:00 AM
Firstpage :
644
Lastpage :
647
Keywords :
"Testing","Integrated circuit interconnections","Wire","Parasitic capacitance","Electrical resistance measurement","Capacitance measurement","Dielectric measurements","Velocity measurement","Ring oscillators","Thickness measurement"
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Print_ISBN :
2-86332-234-6
Type :
conf
Filename :
1503634
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3619507
