• DocumentCode
    3621153
  • Title

    Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

  • Author

    K. Dogheche;B. Cavallier;P. Delobelle;L. Hirsinger;S. Ballandras;E. Cattan;D. Remiens;M. Marzencki;B. Charlot;S. Basrour

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    939
  • Lastpage
    942
  • Keywords
    "Ultrasonic transducers","Biomembranes","Ultrasonic imaging","Silicon","Residual stresses","Thermal stresses","Fabrication","Power generation","Piezoelectric films","Chemical lasers"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603005
  • Filename
    1603005
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621153