DocumentCode

3621187

Title

Calotte PZT thin film structures for micromechanics

Author

F. Calame;P. Muralt

Volume

2

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

1087

Lastpage

1090

Keywords

"Transistors","Piezoelectric films","Substrates","Silicon","Micromechanical devices","Sputtering","Resists","Coatings","Fabrication","Wet etching"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1603039

Filename

1603039