DocumentCode :
3621211
Title :
Single-chip multiple-frequency RF microresonators based on aluminum nitride contour-mode and FBAR technologies
Author :
G. Piazza;P.J. Stephanou;J.P. Black;R.M. White;A.P. Pisano
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1187
Lastpage :
1190
Keywords :
"Radio frequency","Microcavities","Aluminum nitride","Film bulk acoustic resonators","Resonator filters","Acoustic waves","Insertion loss","Oscillators","Shape","Thin film sensors"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603063
Filename :
1603063
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621211