DocumentCode :
3621239
Title :
Low noise silicon micromechanical bulk acoustic wave oscillator
Author :
V. Kaajakari;P. Rantakari;J.K. Koskinen;T. Mattila;J. Kiihamaki;M. Koskenvuori;I. Tittonen;A. Oja
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1299
Lastpage :
1302
Keywords :
"Acoustic noise","Silicon","Micromechanical devices","Acoustic waves","Oscillators","Phase noise","Electrodes","Contact resistance","Circuit stability","Microcavities"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603091
Filename :
1603091
Link To Document :
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