DocumentCode :
3621364
Title :
Assessment of the piezoelectric response of sputtered A1N films by x-ray diffraction
Author :
E. Iborra;A. Sanz-Hervas;M. Clement;L. Vergara;J. Olivares;J. Sangrador
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1808
Lastpage :
1811
Keywords :
"Piezoelectric films","X-ray diffraction","Sputtering","Crystallization","Reflection","Crystallography","X-ray scattering","Semiconductor films","Acoustic diffraction","Surface acoustic waves"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603219
Filename :
1603219
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621364
