DocumentCode :
3621366
Title :
ZnO for thin film BAW devices
Author :
J. Molarius;A. Nurmela;T. Pensala;M. Ylilammi;A. Dommann
Volume :
3
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1816
Lastpage :
1819
Keywords :
"Zinc oxide","Thin film devices","Bulk acoustic wave devices","Piezoelectric films","Resonator filters","Acoustic waves","Film bulk acoustic resonators","Silicon compounds","Atomic force microscopy","Acoustic devices"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603221
Filename :
1603221
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621366
